High Precision Lapping and Polishing Equipments
Precision surface preparation is paramount in semiconductor manufacturing. Our specialized Lapple lapping and polishing roller amrs are engineered to meet the extreme demands of processing semiconductor wafers (Silicon, SiC, GaAs, GaN, InP, Sapphire,MCT,CZT,InSb....) and critical components. They provide the essential foundation for achieving ultra-flat, damage-free surfaces with nanometer-level precision required for subsequent lithography, deposition, and inspection stages. Selection of the optimal plate material and groove pattern is critical based on the substrate material, wafer size (e.g., 150mm, 200mm), process stage (rough lapping, fine lapping, polishing), and desired surface finish.
The Y-shaped roller arm is a critical component that provides secure clamping, controlled independent rotation of the wafer jig/fixture, and exceptional rotational stability. These functions enable greater process flexibility, significantly improve polishing efficiency (higher MRR), and are essential for achieving the ultra-smooth, high-quality surface finishes demanded in precision applications. Its quality and design are paramount to the success of the lapping/polishing process.
The ability to independently control the fixture's rotation direction (co- or counter-rotational) .
Stable rotation and optimized motion paths prevent chatter marks, waviness, and other defects.
The rigid positioning and controlled drive mechanism allow for highly precise and repeatable motion profiles, leading to consistent polishing results batch after batch.
A robust, well-designed, and precisely manufactured swing arm with high-quality rollers is fundamental to achieving the demanding tolerances and surface finishes required in precision optics, semiconductors, and other advanced manufacturing.
| Arm for Jig Size | 3" | 4" | 6" | Special size can be customized. |
|---|---|---|---|---|
| Arm Config | Roller with/without belt groove | Arm with different handles | Arm with driven motor | Special need can be customized. |