Suzhou Lapple Technology Co.,Ltd

High Precision Lapping and Polishing Equipments

Customized Holders

Series:Holders for ECR coating,customized parts.

The Aftex-8000 Series Sample Holder delivers unmatched precision in substrate handling for ECR deposition, combining robust thermal management, contamination-resistant materials, and user-centric design. It maximizes film quality, process yield, and operational flexibility—making it indispensable for advanced thin-film R&D and production.

The Sample Holder is a precision-engineered fixture designed to securely position and stabilize substrates during Electron Cyclotron Resonance (ECR) thin-film deposition processes. It serves as the critical interface between the substrate and the deposition chamber, ensuring optimal exposure to plasma for uniform coating.

Substrate Immobilization:

Holds wafers, glass, or custom-shaped samples firmly in place to prevent displacement during high-vacuum and plasma operations.

Thermal Management:

Facilitates controlled heating/cooling of substrates to maintain precise temperature conditions for film growth.

Positional Accuracy:

Enables precise angular/tilt adjustments to achieve desired film thickness and stoichiometry across complex geometries.

Enhanced Uniformity:

Engineered for 360° plasma exposure with minimal shadowing, ensuring consistent film thickness and composition edge-to-edge.

Customized Parts-Holder-Applications

Semiconductor Wafer Coating Optical/ITO film deposition on glass Functional coating for MEMS,sensors,or R&D prototypes

*Due to the continuous development of the product, there may be changes in the relevant parameters

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